CAMBRIDGE, MA -- 12/01/09 --
Cambridge NanoTech, the world
leader in Atomic Layer
Deposition (ALD) science and equipment, today announced the acquisition
of three Fiji Series plasma ALD systems by U.S. National Laboratories. "The
interest that we have received in the Fiji has been overwhelming," said
Ganesh Sundaram, Vice President of Technology at Cambridge NanoTech. "The
potential advances in the fields of materials science and chemistry that
are made possible through the Fiji are extraordinary."
The three Fijis were acquired by the Naval Research Lab (NRL), the Air
Force Research Lab (AFRL) and the Army Research Lab (ARL). "We are finding
that these leading national labs are attracted to the flexibility offered
by the Fiji, which in turn allows them to expand their materials and device
engineering capabilities," said Dr. Sundaram.
The NRL plans to conduct research into the growth of oxides, metals and
semiconductors, such as InGaN, which span temperatures ranging up to
1,000°C. These materials are of interest to the U.S. Navy because they
promise improved performance in future communications, radar and power
management systems.
Research conducted on the Fiji at AFRL Wright-Patterson Air Force Base will
be focused on the electrical properties of ultra-thin plasma-generated HfO2
films and ARL is going to use the Fiji to support electronic materials and
device projects with conformal deposition of high quality semiconductor,
dielectric, and metal films.
"We have found that the Fiji's combined capabilities of growing ultra-thin
films with plasma-generated co-reactants and allowing in-situ film
analysis, such as OES, ellipsometry, Langmuir probes and QCM, have been
essential to the success of the system," said Mark Sowa, Senior Research
Scientist for Cambridge NanoTech.
This week please visit Cambridge NanoTech at booth # 709 at the Materials
Research Society meeting in Boston, MA, where the Fiji will be on
display.
About Cambridge NanoTech
As the leading provider of Atomic Layer Deposition (ALD) solutions,
Cambridge NanoTech has over 160 ALD systems installed worldwide. Cambridge
NanoTech applies its expertise to solve unique coating challenges by
collaborating on breakthrough research with customers and by offering
next-generation thermal, plasma-enhanced and large-area ALD systems. To
learn more visit us at www.cambridgenanotech.com.
Contact
Ray Ritter
(617) 674 8800
Cambridge NanoTech, Inc.
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